Transponder Systems for Identification and Micro-Telemetry Dr. Gerd vom Boegel Director: Prof. Dr. rer. nat. Anton Grabmaier Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme, Duisburg 1 GvB MINAPIM, Sept. 2008, Manaus Contents Introduction of Fraunhofer IMS Current Applications of Transponder-Systems Basics of Transponder Systems Chip-Technology and integrated Sensors Applications Trends and new Applications G. vom Boegel 2 MINAPIM, Sept. 2008, Manaus Fraunhofer IMS Foundation: 1984/85 Staff: > 200 Mission: product devel. industry • Applied Research, development, and production of innovative microelectronic products • Technology development and transfer applied research basic research FraunhoferGesellschaft Max-Planck-Gesellschaft 100% public G. vom Boegel 100% privat Budget: (18,8 Mio. Euro for 2008) 25 % basic funding for corporate research and administration 25 % publicly funded projects 50 % projects funded by industry 3 MINAPIM, Sept. 2008, Manaus IMS Infrastructure Clean Room of IMS Duisburg • Total area: • Clean room class: • Wafer size: 1300 m2 • Staff: • Capacity: app. 90 in 4 shifts / 7days a week 10 200 mm (8 inch, 0.25µm) > 70.000 wafer/p.a. Production range • Complete CMOS process line plus integrated sensors • Production from some 100 ASICs/p.a. - > 1,000,000 ASICs/p.a. G. vom Boegel 4 MINAPIM, Sept. 2008, Manaus IMS Infrastructure Microsystems Lab • Total area: 400 m² (600 m² in 2008) • Clean room class: 10 • Wafer size: 200 mm • Staff: • Mission: 5+ Extending the application areas of CMOS (“More than Moore”) by Post Processing on CMOS wafers Development Activities • Adding layers, structures, devices onto preprocessed “intelligent substrates” (CMOS wafers) to create integrated sensor systems. Examples: Bolometer arrays for IR imaging, Biosensors G. vom Boegel 5 MINAPIM, Sept. 2008, Manaus Currently used Immobilizer of Passenger Cars Applications Electronic Ear-Tag of Control of Material Flow in Production Transponder Sports Timing (e.g. Marathon) Systems Access control at Skiing Lifts Baggage Sorting Maut Control Building Automation Waste Management G. vom Boegel . . . 6 MINAPIM, Sept. 2008, Manaus Frequency Bands for Transponder Applications H, dBµA/m in 10m ERP, mW (<30MHz) (>30MHz) 80 100 - 135 kHz 60 13,56 MHz 2,45 GHz 250 40 25 20 6,78 13,56 27,125 40,68 433 Frequency: 0,01 Wave length: 30.000 G. vom Boegel 868 915 2450 5800 24.000 0,01 1 10 100 1000 10.000 3.000 300 30 3 0,3 0,03 100.000 MHz 0,003 m 7 MINAPIM, Sept. 2008, Manaus Principle of Energy Transmission within passive Transponder Systems C Energie, Takt V2 ~ Chip G C1 V1 L1 Lesegerät Reader G. vom Boegel V3 MOD L2 Transponder magnetisches Feld H 8 MINAPIM, Sept. 2008, Manaus Temperature Monitoring Transponder „TempLog-Label“ VDD Battery Voltagecontrol regler Vregel Data RFFrontend Data Clock Processorcore A/DConverter Antenna Clock Oszi. Transponder-ASIC G. vom Boegel Programmemory TemperatureSensor regler 9 MINAPIM, Sept. 2008, Manaus Temperature-Transponder ASIC (ISO-Standard 15693) Versorgungsspannung 2,4 – 3,6 V Ruhestrom < 1 µA Stromaufnahme 250 µA Temperaturbereich -40 – 70 °C Datenübertragung 1,65 kBit/s down-stream 26,48 kBit/s Datenübertragung 6,62 kBit/s; 6,67 kBit/s up-stream 26,48 kBit/s; 26,69 kBit/s 96 Bit ID-Nummer + Kalibrierwerte Speicher 2 kBit Datenspeicher Chipfläche G. vom Boegel 7,83 mm² 10 MINAPIM, Sept. 2008, Manaus Pressure and Temperature Transponder G. vom Boegel 11 MINAPIM, Sept. 2008, Manaus Photograph: Transponder Chip with Pressure Sensor G. vom Boegel 12 MINAPIM, Sept. 2008, Manaus Micro-machined Pressure Sensor Elements Membran Passivierung Kontakte Substratelektrode G. vom Boegel Unterdruck 13 MINAPIM, Sept. 2008, Manaus Active Tire-Pressure Transponder System G. vom Boegel 14 MINAPIM, Sept. 2008, Manaus Active Tire Pressure Transponder System Reader G. vom Boegel 15 MINAPIM, Sept. 2008, Manaus Vacuum Monitoring in Vacuum-Isolation panels (VIP) Embedded Transponder in VIP VIP-Assembly: - Filler Material - Transponder - Foil G. vom Boegel VIP-Mounting 16 MINAPIM, Sept. 2008, Manaus Example Tele-Medicine: Monitoring of „Glaucoma“ patients Aim: Prevent blindness due to Glaucoma Measuring of pressure with in-eye pressure sensor Reader-Antenna integrated in glasses Continuous Monitoring of Pressure Alarm at over-pressure G. vom Boegel nergy andEC lock A ntenna Data R etina T ransc eive rw ithpressure sensor, te m pera turese nso a ndse nsorele ktronic s 17 MINAPIM, Sept. 2008, Manaus Example Tele-Medicine: Monitoring of „Glaucoma“ patients Transponder in Silicon Capsulation G. vom Boegel 18 MINAPIM, Sept. 2008, Manaus Example of active Transponder IMS - µNode: G. vom Boegel Ultra-Low-Power Processor 3-Volt-Battery RF-Link with 2,45 GHz Frontend and 100 Canals ZigBee Protocol LF-Link / Wake-Up with 125 kHz Frontend 19 MINAPIM, Sept. 2008, Manaus Agricultural Application of active System: Wireless Monitoring: • Humidity (Air and Earth) • Temperature (Air and Earth) • Light • pH-Value Feature: • Operation over one Period (Source: Fraunhofer-IMS) G. vom Boegel 20 MINAPIM, Sept. 2008, Manaus Agricultural Application of active System: 25 Sensor 1 Sensor 2 Sensor 3 Sensor 4 20 15 10 5 0 (Source: LWK NRW, Fraunhofer IMS) G. vom Boegel 12pm 4pm 8pm 12am 4am 8am 12pm 2004/12/21 2004/12/21 2004/12/21 2004/12/22 2004/12/22 2004/12/22 2004/12/22 Time / Date 21 MINAPIM, Sept. 2008, Manaus Summary Transponder-Systems are already used in many applications The Combination of RFID and Sensors opens new Applications in many Areas IMS offers Development- and Production-Service Source: Fraunhofer-IMS) G. vom Boegel 22 MINAPIM, Sept. 2008, Manaus Thank you for your attention Contact Gerd vom Boegel: G. vom Boegel 23